E-Beam Evaporator system integrated with its in-house designed Glovebox provides suitable for various applications.
E-Beam Evaporator system integrated with its in-house designed Glovebox provides suitable for various applications.
E-Beam Evaporator system integrated with its in-house designed Glovebox provides suitable for various applications.
|
Process Chamber Dimension |
450(W) * 450(D) * 400(H) |
|
Sample Size |
Piece to Max 100mm * 100mm Glass |
|
E-Beam Power Capacity |
6 KW |
|
E-Beam Gun |
7cc x 6 Pockets |
|
Chamber Ultimate Pressure |
Below than 5.0 x 10-7 Torr |
|
Chamber Working Pressure |
Below than 5.0 x 10-6 Torr within 30 Minutes |
|
Film Thickness Uniformity |
<+/-5% within 100mm * 100mm Glass |
