Thermal Evaporator system integrated with its in-house designed Glovebox provides suitable for various applications. Compact design for Advantage of lab space.
Thermal Evaporator system integrated with its in-house designed Glovebox provides suitable for various applications. Compact design for Advantage of lab space.
Thermal Evaporator system integrated with its in-house designed Glovebox provides suitable for various applications. Compact design for Advantage of lab space.
|
Process Chamber Dimension |
450(W) * 450(D) * 400(H) |
|
Sample Size |
Piece to Max 100mm * 100mm Glass |
|
Cathode Size |
O.D 3” x 3 Sets |
|
Plasma Power Supply |
RF Power & DC Power Supply |
|
Chamber Ultimate Pressure |
<+/-5% within 170mm * 170mm Glass |
|
Chamber Working Pressure |
Below than 5.0 x 10-6 Torr within 30 Minutes |
|
Film Thickness Uniformity |
<+/-5% within 100mm * 100mm Glass |
