Thermal Evaporator system integrated with its in-house designed Glovebox provides suitable for various applications. Minimize chamber size to maximize glovebox internal space.
Thermal Evaporator system integrated with its in-house designed Glovebox provides suitable for various applications. Minimize chamber size to maximize glovebox internal space.
Thermal Evaporator system integrated with its in-house designed Glovebox provides suitable for various applications. Minimize chamber size to maximize glovebox internal space.
|
Chamber Ultimate Pressure |
Below than 3.0 x 10-7 Torr |
|
Chamber Working Pressure |
Below than 5.0 x 10-6 Torr within 30 Minutes |
|
Film Thickness Uniformity |
<+/-5% within 100mm * 100mm Glass (1” * 1” Glass 9ea) |
